Dependence of Decontamination Performance on Co distribution in Test Pieces in Dry Surface Decontamination with Low-Pressure Arc Plasma
نویسندگان
چکیده
We have been studying dry surface decontamination technology with low-pressure arc plasma (LPAP). The dependence of the decontamination performance on Co distribution in the test piece was investigated. The Co removal ratio became lower when Co was distributed more deeply in the metal oxide film, although all the metal oxide film was removed. However, a Co removal ratio exceeding 90% was eventually achieved by repeated LPAP treatment.
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